Fabrication and characterization of hot-electron bolometers for THz applications

Superconducting properties of Nb and NbN thin films for application in diffusion and phonon cooled Hot-Electron Bolometers have been systematically investigated. The materials were sputtered on fused quartz substrates in a wide thickness range. DC-measurements of the Nb films allow us to predict the...

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Veröffentlicht in:	IEEE transactions on applied superconductivity 2001-03, Vol.11 (1), p.566-569
Hauptverfasser:	Frommberger, M., Sabon, P., Schicke, M., Mattiocco, F., Schuster, K.F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Bandwidth Bolometers Electronics Exact sciences and technology Fabrication Frequency Niobium Phonons Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Sputtering Superconducting devices Superconducting films Superconducting materials Superconducting thin films
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Beschreibung
Zusammenfassung:	Superconducting properties of Nb and NbN thin films for application in diffusion and phonon cooled Hot-Electron Bolometers have been systematically investigated. The materials were sputtered on fused quartz substrates in a wide thickness range. DC-measurements of the Nb films allow us to predict the intermediate frequency bandwidth of a hot-electron bolometer mixer device for a given design. To improve the characteristics of the NbN thin films, we used a 15 nm MgO seed layer.
ISSN:	1051-8223 1558-2515
DOI:	10.1109/77.919408