Silicon solar cell process monitoring by PV-reflectometer

A new instrument, the PV-reflectometer, is developed for process control and monitoring in PV industry. This system can rapidly measure a host of parameters averaged over the entire wafer/cell. Here we describe the main features of the instrument and its applications for monitoring various Si solar...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Sopori, B., Yi Zhang, Wei Chen, Madjdpour, J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
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