Silicon solar cell process monitoring by PV-reflectometer

Silicon solar cell process monitoring by PV-reflectometer

A new instrument, the PV-reflectometer, is developed for process control and monitoring in PV industry. This system can rapidly measure a host of parameters averaged over the entire wafer/cell. Here we describe the main features of the instrument and its applications for monitoring various Si solar...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Sopori, B., Yi Zhang, Wei Chen, Madjdpour, J.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Coatings
Electrical equipment industry
Fabrication
Industrial control
Instruments
Monitoring
Photovoltaic cells
Process control
Sawing
Silicon
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Beschreibung
Zusammenfassung:A new instrument, the PV-reflectometer, is developed for process control and monitoring in PV industry. This system can rapidly measure a host of parameters averaged over the entire wafer/cell. Here we describe the main features of the instrument and its applications for monitoring various Si solar cell fabrication processes, including sawing, texturing, AR coating, and front and back metallization.
ISSN:0160-8371
DOI:10.1109/PVSC.2000.915769