Thermoreflectance imaging of superlattice micro refrigerators

Thermoreflectance imaging of superlattice micro refrigerators

High resolution thermal images of semiconductor micro refrigerators are presented. Using the thermoreflectance method and a high dynamic range PIN array camera, thermal images with 50 mK temperature resolution and high spatial resolution are presented. This general method can be applied to any integ...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Christofferson, J., Vashaee, D., Shakouri, A., Melese, P., Xiaofeng Fan, Gehong Zeng, Labounty, C., Bowers, J.E., Croke, E.T.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Filtering
Frequency
Image resolution
Optical reflection
Refrigerators
Spatial resolution
Superlattices
Temperature control
Temperature dependence
Thermoreflectance imaging
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:High resolution thermal images of semiconductor micro refrigerators are presented. Using the thermoreflectance method and a high dynamic range PIN array camera, thermal images with 50 mK temperature resolution and high spatial resolution are presented. This general method can be applied to any integrated circuit, and can be used as a tool for identifying fabrication failures. With further optimization of the experimental set-up, we expect to obtain thermal images with sub-micron spatial resolution.
DOI:10.1109/STHERM.2001.915145