MEM relay for reconfigurable RF circuits

We describe a microelectromechanical (MEM) relay technology for high-performance reconfigurable RF circuits. This microrelay, fabricated using surface micromachining, is a metal contact relay with electrical isolation between signal and drive lines. This relay provides excellent switching performanc...

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Veröffentlicht in:	IEEE microwave and wireless components letters 2001-02, Vol.11 (2), p.53-55
Hauptverfasser:	Mihailovich, R.E., Kim, M., Hacker, J.B., Sovero, E.A., Studer, J., Higgins, J.A., DeNatale, J.F.
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Circuit properties Circuits Contact Contacts Electric, optical and optoelectronic circuits Electronics Exact sciences and technology Insertion loss Isolation technology Micromachining Microrelays Microwave circuits, microwave integrated circuits, microwave transmission lines, submillimeter wave circuits Microwaves Noise levels Performance loss Radio frequencies Radio frequency Relay Relays Switches Switching circuits
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Beschreibung
Zusammenfassung:	We describe a microelectromechanical (MEM) relay technology for high-performance reconfigurable RF circuits. This microrelay, fabricated using surface micromachining, is a metal contact relay with electrical isolation between signal and drive lines. This relay provides excellent switching performance over a broad frequency band (insertion loss of 0.1 dB and isolation of 30 dB at 40 GHz), versatility in switch circuit configurations (microstrip and coplanar, shunt and series), and the capability for monolithic integration with high-frequency electronics. In addition, this MEM relay technology has demonstrated yields and lifetimes that are promising for RF circuit implementation.
ISSN:	1531-1309 2771-957X 1558-1764 2771-9588
DOI:	10.1109/7260.914300