A single-chip CMOS resonant beam gas sensor

A single-chip CMOS resonant beam gas sensor

A micromachined resonant beam gas sensor for detection of organic volatiles is monolithically integrated with thermal actuators, piezoresistive read out, and circuitry for self-excitation and fabricated in standard CMOS technology. Mass load due to analyze absorption in a sensitive coating changes b...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Hagleitner, G., Lange, D., Brand, O., Hierlemann, A., Baltes, H.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Absorption
Actuators
CMOS technology
Coatings
Gas detectors
Integrated circuit technology
Piezoresistance
Resonance
Resonant frequency
RLC circuits
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page 247
container_issue
container_start_page 246
container_title
container_volume
creator Hagleitner, G.
Lange, D.
Brand, O.
Hierlemann, A.
Baltes, H.
description A micromachined resonant beam gas sensor for detection of organic volatiles is monolithically integrated with thermal actuators, piezoresistive read out, and circuitry for self-excitation and fabricated in standard CMOS technology. Mass load due to analyze absorption in a sensitive coating changes beam resonance frequency. The limit of detection is 1 ppm for toluene.
doi_str_mv 10.1109/ISSCC.2001.912623
format Conference Proceeding
fullrecord <record><control><sourceid>proquest_6IE</sourceid><recordid>TN_cdi_ieee_primary_912623</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>912623</ieee_id><sourcerecordid>26957706</sourcerecordid><originalsourceid>FETCH-LOGICAL-i118t-bb2e7d0dd8fd1a6cfe149570bcb1f7f80223fc9a1f8900f317d2adca1bb692ff3</originalsourceid><addsrcrecordid>eNotkLlOw0AUAFccEk7gA6ByRYNs3tvFe5SRxREpKIWhtnbtt8HIF16n4O-JZKppRlMMY7cIKSKYx21R5HnKATA1yCUXZyziQslES5DnbAVKg5ASdHbBIkAjEpkJuGKrEL4BIDNSR-xhE4emP7SUVF_NGOfv-yKeKAy97efYke3igw1xoD4M0zW79LYNdPPPNft8ef7I35Ld_nWbb3ZJg6jnxDlOqoa61r5GKytP-GQyBa5y6JXXwLnwlbHotQHwAlXNbV1ZdE4a7r1Ys_ulO07Dz5HCXHZNqKhtbU_DMZRcnnIK5Em8W8SGiMpxajo7_ZbLDPEH03NQZQ</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype><pqid>26957706</pqid></control><display><type>conference_proceeding</type><title>A single-chip CMOS resonant beam gas sensor</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Hagleitner, G. ; Lange, D. ; Brand, O. ; Hierlemann, A. ; Baltes, H.</creator><creatorcontrib>Hagleitner, G. ; Lange, D. ; Brand, O. ; Hierlemann, A. ; Baltes, H.</creatorcontrib><description>A micromachined resonant beam gas sensor for detection of organic volatiles is monolithically integrated with thermal actuators, piezoresistive read out, and circuitry for self-excitation and fabricated in standard CMOS technology. Mass load due to analyze absorption in a sensitive coating changes beam resonance frequency. The limit of detection is 1 ppm for toluene.</description><identifier>ISSN: 0193-6530</identifier><identifier>ISBN: 0780366085</identifier><identifier>ISBN: 9780780366084</identifier><identifier>EISSN: 2376-8606</identifier><identifier>DOI: 10.1109/ISSCC.2001.912623</identifier><language>eng</language><publisher>IEEE</publisher><subject>Absorption ; Actuators ; CMOS technology ; Coatings ; Gas detectors ; Integrated circuit technology ; Piezoresistance ; Resonance ; Resonant frequency ; RLC circuits</subject><ispartof>2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177), 2001, p.246-247</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/912623$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,4050,4051,27925,54920</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/912623$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Hagleitner, G.</creatorcontrib><creatorcontrib>Lange, D.</creatorcontrib><creatorcontrib>Brand, O.</creatorcontrib><creatorcontrib>Hierlemann, A.</creatorcontrib><creatorcontrib>Baltes, H.</creatorcontrib><title>A single-chip CMOS resonant beam gas sensor</title><title>2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177)</title><addtitle>ISSCC</addtitle><description>A micromachined resonant beam gas sensor for detection of organic volatiles is monolithically integrated with thermal actuators, piezoresistive read out, and circuitry for self-excitation and fabricated in standard CMOS technology. Mass load due to analyze absorption in a sensitive coating changes beam resonance frequency. The limit of detection is 1 ppm for toluene.</description><subject>Absorption</subject><subject>Actuators</subject><subject>CMOS technology</subject><subject>Coatings</subject><subject>Gas detectors</subject><subject>Integrated circuit technology</subject><subject>Piezoresistance</subject><subject>Resonance</subject><subject>Resonant frequency</subject><subject>RLC circuits</subject><issn>0193-6530</issn><issn>2376-8606</issn><isbn>0780366085</isbn><isbn>9780780366084</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2001</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotkLlOw0AUAFccEk7gA6ByRYNs3tvFe5SRxREpKIWhtnbtt8HIF16n4O-JZKppRlMMY7cIKSKYx21R5HnKATA1yCUXZyziQslES5DnbAVKg5ASdHbBIkAjEpkJuGKrEL4BIDNSR-xhE4emP7SUVF_NGOfv-yKeKAy97efYke3igw1xoD4M0zW79LYNdPPPNft8ef7I35Ld_nWbb3ZJg6jnxDlOqoa61r5GKytP-GQyBa5y6JXXwLnwlbHotQHwAlXNbV1ZdE4a7r1Ys_ulO07Dz5HCXHZNqKhtbU_DMZRcnnIK5Em8W8SGiMpxajo7_ZbLDPEH03NQZQ</recordid><startdate>2001</startdate><enddate>2001</enddate><creator>Hagleitner, G.</creator><creator>Lange, D.</creator><creator>Brand, O.</creator><creator>Hierlemann, A.</creator><creator>Baltes, H.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope><scope>7U5</scope><scope>8FD</scope><scope>L7M</scope></search><sort><creationdate>2001</creationdate><title>A single-chip CMOS resonant beam gas sensor</title><author>Hagleitner, G. ; Lange, D. ; Brand, O. ; Hierlemann, A. ; Baltes, H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i118t-bb2e7d0dd8fd1a6cfe149570bcb1f7f80223fc9a1f8900f317d2adca1bb692ff3</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2001</creationdate><topic>Absorption</topic><topic>Actuators</topic><topic>CMOS technology</topic><topic>Coatings</topic><topic>Gas detectors</topic><topic>Integrated circuit technology</topic><topic>Piezoresistance</topic><topic>Resonance</topic><topic>Resonant frequency</topic><topic>RLC circuits</topic><toplevel>online_resources</toplevel><creatorcontrib>Hagleitner, G.</creatorcontrib><creatorcontrib>Lange, D.</creatorcontrib><creatorcontrib>Brand, O.</creatorcontrib><creatorcontrib>Hierlemann, A.</creatorcontrib><creatorcontrib>Baltes, H.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Advanced Technologies Database with Aerospace</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Hagleitner, G.</au><au>Lange, D.</au><au>Brand, O.</au><au>Hierlemann, A.</au><au>Baltes, H.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>A single-chip CMOS resonant beam gas sensor</atitle><btitle>2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177)</btitle><stitle>ISSCC</stitle><date>2001</date><risdate>2001</risdate><spage>246</spage><epage>247</epage><pages>246-247</pages><issn>0193-6530</issn><eissn>2376-8606</eissn><isbn>0780366085</isbn><isbn>9780780366084</isbn><abstract>A micromachined resonant beam gas sensor for detection of organic volatiles is monolithically integrated with thermal actuators, piezoresistive read out, and circuitry for self-excitation and fabricated in standard CMOS technology. Mass load due to analyze absorption in a sensitive coating changes beam resonance frequency. The limit of detection is 1 ppm for toluene.</abstract><pub>IEEE</pub><doi>10.1109/ISSCC.2001.912623</doi><tpages>2</tpages></addata></record>
fulltext fulltext_linktorsrc
identifier ISSN: 0193-6530
ispartof 2001 IEEE International Solid-State Circuits Conference. Digest of Technical Papers. ISSCC (Cat. No.01CH37177), 2001, p.246-247
issn 0193-6530
2376-8606
language eng
recordid cdi_ieee_primary_912623
source IEEE Electronic Library (IEL) Conference Proceedings
subjects Absorption
Actuators
CMOS technology
Coatings
Gas detectors
Integrated circuit technology
Piezoresistance
Resonance
Resonant frequency
RLC circuits
title A single-chip CMOS resonant beam gas sensor
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-25T23%3A27%3A16IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-proquest_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=A%20single-chip%20CMOS%20resonant%20beam%20gas%20sensor&rft.btitle=2001%20IEEE%20International%20Solid-State%20Circuits%20Conference.%20Digest%20of%20Technical%20Papers.%20ISSCC%20(Cat.%20No.01CH37177)&rft.au=Hagleitner,%20G.&rft.date=2001&rft.spage=246&rft.epage=247&rft.pages=246-247&rft.issn=0193-6530&rft.eissn=2376-8606&rft.isbn=0780366085&rft.isbn_list=9780780366084&rft_id=info:doi/10.1109/ISSCC.2001.912623&rft_dat=%3Cproquest_6IE%3E26957706%3C/proquest_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_pqid=26957706&rft_id=info:pmid/&rft_ieee_id=912623&rfr_iscdi=true