A single-chip CMOS resonant beam gas sensor

A single-chip CMOS resonant beam gas sensor

A micromachined resonant beam gas sensor for detection of organic volatiles is monolithically integrated with thermal actuators, piezoresistive read out, and circuitry for self-excitation and fabricated in standard CMOS technology. Mass load due to analyze absorption in a sensitive coating changes b...

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Bibliographische Detailangaben
Hauptverfasser: Hagleitner, G., Lange, D., Brand, O., Hierlemann, A., Baltes, H.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Absorption
Actuators
CMOS technology
Coatings
Gas detectors
Integrated circuit technology
Piezoresistance
Resonance
Resonant frequency
RLC circuits
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Beschreibung
Zusammenfassung:A micromachined resonant beam gas sensor for detection of organic volatiles is monolithically integrated with thermal actuators, piezoresistive read out, and circuitry for self-excitation and fabricated in standard CMOS technology. Mass load due to analyze absorption in a sensitive coating changes beam resonance frequency. The limit of detection is 1 ppm for toluene.
ISSN:0193-6530
2376-8606
DOI:10.1109/ISSCC.2001.912623