Precision micro-machining with nanosecond lasers

Summary form only given. Visible and ultraviolet lasers with pulse durations of a few nanoseconds have demonstrated an ability to machine a wide variety of materials with micron precision and submicronsized heat affected zones and recast layers.

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Bibliographische Detailangaben
Hauptverfasser: Knowles, M.R.H., Rutterford, G., Bell, A.I., Andrews, A.J., Foster-Turner, G., Kearsley, A.J., Coutis, D.W., Kapitan, D., Webb, C.E.
Format: Tagungsbericht
Sprache:eng
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Beschreibung
Zusammenfassung:Summary form only given. Visible and ultraviolet lasers with pulse durations of a few nanoseconds have demonstrated an ability to machine a wide variety of materials with micron precision and submicronsized heat affected zones and recast layers.
DOI:10.1109/CLEO.2000.907419