Effect of the wavelength on high-aspect ratio microdrilling of steel with an all-solid-state laser

Summary form only given.We investigated wavelength and intensity dependences of the ablation rate in steel using a 10 kHz diode-pumped laser source. We present practical examples of trepanning of 100 /spl mu/m-diameter holes in up to 1 mm-thick steel with roundness and taper errors within a few micr...

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Hauptverfasser: Govorkov, S.V., Slobodtchikov, E.V., Wiessner, A.O., Basting, D.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Summary form only given.We investigated wavelength and intensity dependences of the ablation rate in steel using a 10 kHz diode-pumped laser source. We present practical examples of trepanning of 100 /spl mu/m-diameter holes in up to 1 mm-thick steel with roundness and taper errors within a few micrometers. Additionally, by using 10 W UV output of the laser, we demonstrated percussion-drilling of 30 /spl mu/m-diameter holes in 1.5 mm-thick steel with aspect ratio of 50 and taper not exceeding 15%.
DOI:10.1109/CLEO.2000.907418