Effect of the wavelength on high-aspect ratio microdrilling of steel with an all-solid-state laser
Summary form only given.We investigated wavelength and intensity dependences of the ablation rate in steel using a 10 kHz diode-pumped laser source. We present practical examples of trepanning of 100 /spl mu/m-diameter holes in up to 1 mm-thick steel with roundness and taper errors within a few micr...
Gespeichert in:
Hauptverfasser: | , , , |
---|---|
Format: | Tagungsbericht |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Summary form only given.We investigated wavelength and intensity dependences of the ablation rate in steel using a 10 kHz diode-pumped laser source. We present practical examples of trepanning of 100 /spl mu/m-diameter holes in up to 1 mm-thick steel with roundness and taper errors within a few micrometers. Additionally, by using 10 W UV output of the laser, we demonstrated percussion-drilling of 30 /spl mu/m-diameter holes in 1.5 mm-thick steel with aspect ratio of 50 and taper not exceeding 15%. |
---|---|
DOI: | 10.1109/CLEO.2000.907418 |