Numerical study of the discharge spatial characteristics influence on the KrF laser generation
A self-consistent two-dimensional model of the discharge KrF laser on Ne/Kr/F2 gas mixtures is described. The model predictions are compared with the experimental results for a KrF laser with an excitation pulse duration of ~ 30 ns. An agreement within 10% for the discharge current and laser energy...
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Veröffentlicht in: | IEEE journal of quantum electronics 2020-04, Vol.56 (2), p.1-1 |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | A self-consistent two-dimensional model of the discharge KrF laser on Ne/Kr/F2 gas mixtures is described. The model predictions are compared with the experimental results for a KrF laser with an excitation pulse duration of ~ 30 ns. An agreement within 10% for the discharge current and laser energy is obtained. Evolution of the discharge width and of the radiation intensity distribution between the electrodes over the time of a radiation pulse is demonstrated. In addition, the effect of the electrode radii on laser energy is analyzed. |
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ISSN: | 0018-9197 1558-1713 |
DOI: | 10.1109/JQE.2020.2976532 |