Design and Experiment for Dual-mass MEMS Gyroscope Sensing closed-loop System
This paper presents a sense mode closed-loop controlling system for micro-electro-mechanical system (MEMS) gyroscopes, and the controller is designed to achieve low error, wide bandwidth and low noise capability. The gyroscope monitoring system includes four independent closed-loop, and is simulated...
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| Veröffentlicht in: | IEEE access 2020-01, Vol.8, p.1-1 |
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| creator | Cao, Huiliang Xue, Rihui Cai, Qi Gao, Jinyang Zhao, Rui Shi, Yunbo Huang, Kun Shao, Xingling Shen, Chong |
| description | This paper presents a sense mode closed-loop controlling system for micro-electro-mechanical system (MEMS) gyroscopes, and the controller is designed to achieve low error, wide bandwidth and low noise capability. The gyroscope monitoring system includes four independent closed-loop, and is simulated by Simulink soft to prove the speedability and stability of the sensing closed-loop. The system is realized through 3 analog PCBs and is tested on the turntable in temperature oven. The bias stability, angular random walking value and bias temperature coefficients improved from 2.168 °/h, 0.155°/√h and 10.59 °/h/℃ to 0.415 °/h, 0.0414°/√h and 3.59°/h/℃. And the bandwidth value is improved from 13Hz to 104Hz. Meanwhile, scale factor nonlinearity, asymmetry, repeatability and temperature coefficient parameters are enhanced from 660 ppm, 430ppm, 403ppm and 180 ppm/℃ to 59.3ppm, 62.4ppm, 50.4ppm and 28.7 ppm/℃ respectively. |
| doi_str_mv | 10.1109/ACCESS.2020.2977223 |
| format | Article |
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The gyroscope monitoring system includes four independent closed-loop, and is simulated by Simulink soft to prove the speedability and stability of the sensing closed-loop. The system is realized through 3 analog PCBs and is tested on the turntable in temperature oven. The bias stability, angular random walking value and bias temperature coefficients improved from 2.168 °/h, 0.155°/√h and 10.59 °/h/℃ to 0.415 °/h, 0.0414°/√h and 3.59°/h/℃. And the bandwidth value is improved from 13Hz to 104Hz. Meanwhile, scale factor nonlinearity, asymmetry, repeatability and temperature coefficient parameters are enhanced from 660 ppm, 430ppm, 403ppm and 180 ppm/℃ to 59.3ppm, 62.4ppm, 50.4ppm and 28.7 ppm/℃ respectively.</description><identifier>ISSN: 2169-3536</identifier><identifier>EISSN: 2169-3536</identifier><identifier>DOI: 10.1109/ACCESS.2020.2977223</identifier><identifier>CODEN: IAECCG</identifier><language>eng</language><publisher>Piscataway: IEEE</publisher><subject>Analog circuits ; Bias ; Circuit boards ; Control stability ; Control systems design ; Drives ; experiment ; Feedback control ; Gyroscopes ; Low noise ; Mechanical systems ; MEMS gyroscope ; Micro Electro Mechanical System (MEMS) gyroscope ; Microelectromechanical systems ; Micromechanical devices ; Monitoring systems ; Noise monitoring ; quadrature error ; Robot sensing systems ; sensing closed-loop ; Springs ; step response ; Temperature ; Turntables</subject><ispartof>IEEE access, 2020-01, Vol.8, p.1-1</ispartof><rights>Copyright The Institute of Electrical and Electronics Engineers, Inc. (IEEE) 2020</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c408t-17a7cb74a1ce6345cc2f9b28565c8a219535bbb9c0b13bdb7fb060d3381e7f5b3</citedby><cites>FETCH-LOGICAL-c408t-17a7cb74a1ce6345cc2f9b28565c8a219535bbb9c0b13bdb7fb060d3381e7f5b3</cites><orcidid>0000-0002-9811-8845 ; 0000-0001-8247-1196 ; 0000-0002-6046-6051 ; 0000-0001-9862-4329</orcidid></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/9018052$$EHTML$$P50$$Gieee$$Hfree_for_read</linktohtml><link.rule.ids>314,780,784,864,2100,27624,27915,27916,54924</link.rule.ids></links><search><creatorcontrib>Cao, Huiliang</creatorcontrib><creatorcontrib>Xue, Rihui</creatorcontrib><creatorcontrib>Cai, Qi</creatorcontrib><creatorcontrib>Gao, Jinyang</creatorcontrib><creatorcontrib>Zhao, Rui</creatorcontrib><creatorcontrib>Shi, Yunbo</creatorcontrib><creatorcontrib>Huang, Kun</creatorcontrib><creatorcontrib>Shao, Xingling</creatorcontrib><creatorcontrib>Shen, Chong</creatorcontrib><title>Design and Experiment for Dual-mass MEMS Gyroscope Sensing closed-loop System</title><title>IEEE access</title><addtitle>Access</addtitle><description>This paper presents a sense mode closed-loop controlling system for micro-electro-mechanical system (MEMS) gyroscopes, and the controller is designed to achieve low error, wide bandwidth and low noise capability. The gyroscope monitoring system includes four independent closed-loop, and is simulated by Simulink soft to prove the speedability and stability of the sensing closed-loop. The system is realized through 3 analog PCBs and is tested on the turntable in temperature oven. The bias stability, angular random walking value and bias temperature coefficients improved from 2.168 °/h, 0.155°/√h and 10.59 °/h/℃ to 0.415 °/h, 0.0414°/√h and 3.59°/h/℃. And the bandwidth value is improved from 13Hz to 104Hz. Meanwhile, scale factor nonlinearity, asymmetry, repeatability and temperature coefficient parameters are enhanced from 660 ppm, 430ppm, 403ppm and 180 ppm/℃ to 59.3ppm, 62.4ppm, 50.4ppm and 28.7 ppm/℃ respectively.</description><subject>Analog circuits</subject><subject>Bias</subject><subject>Circuit boards</subject><subject>Control stability</subject><subject>Control systems design</subject><subject>Drives</subject><subject>experiment</subject><subject>Feedback control</subject><subject>Gyroscopes</subject><subject>Low noise</subject><subject>Mechanical systems</subject><subject>MEMS gyroscope</subject><subject>Micro Electro Mechanical System (MEMS) gyroscope</subject><subject>Microelectromechanical systems</subject><subject>Micromechanical devices</subject><subject>Monitoring systems</subject><subject>Noise monitoring</subject><subject>quadrature error</subject><subject>Robot sensing systems</subject><subject>sensing closed-loop</subject><subject>Springs</subject><subject>step response</subject><subject>Temperature</subject><subject>Turntables</subject><issn>2169-3536</issn><issn>2169-3536</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2020</creationdate><recordtype>article</recordtype><sourceid>ESBDL</sourceid><sourceid>RIE</sourceid><sourceid>DOA</sourceid><recordid>eNpNUU1LxDAQLaKgqL_AS8Bz13w2yVHWVRdcPFTPIUmnS5duU5MuuP_eaEWcywyPeW8e84rihuAFIVjf3S-Xq7peUEzxgmopKWUnxQUllS6ZYNXpv_m8uE5ph3OpDAl5UWweIHXbAdmhQavPEWK3h2FCbYjo4WD7cm9TQpvVpkZPxxiSDyOgGobUDVvk-5CgKfsQRlQf0wT7q-KstX2C699-Wbw_rt6Wz-XL69N6ef9Seo7VVBJppXeSW-KhYlx4T1vtqBKV8MpSogUTzjntsSPMNU62Dle4YUwRkK1w7LJYz7pNsDszZtM2Hk2wnfkBQtwaG6fO92C89txJbHVW4K2ulPKcWQdUMyxUg7PW7aw1xvBxgDSZXTjEIds3lAsuuZS6ylts3vL5CylC-3eVYPMdg5ljMN8xmN8YMutmZnUA8MfQmCgsKPsCyumCFw</recordid><startdate>20200101</startdate><enddate>20200101</enddate><creator>Cao, Huiliang</creator><creator>Xue, Rihui</creator><creator>Cai, Qi</creator><creator>Gao, Jinyang</creator><creator>Zhao, Rui</creator><creator>Shi, Yunbo</creator><creator>Huang, Kun</creator><creator>Shao, Xingling</creator><creator>Shen, Chong</creator><general>IEEE</general><general>The Institute of Electrical and Electronics Engineers, Inc. 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The gyroscope monitoring system includes four independent closed-loop, and is simulated by Simulink soft to prove the speedability and stability of the sensing closed-loop. The system is realized through 3 analog PCBs and is tested on the turntable in temperature oven. The bias stability, angular random walking value and bias temperature coefficients improved from 2.168 °/h, 0.155°/√h and 10.59 °/h/℃ to 0.415 °/h, 0.0414°/√h and 3.59°/h/℃. And the bandwidth value is improved from 13Hz to 104Hz. 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| subjects | Analog circuits Bias Circuit boards Control stability Control systems design Drives experiment Feedback control Gyroscopes Low noise Mechanical systems MEMS gyroscope Micro Electro Mechanical System (MEMS) gyroscope Microelectromechanical systems Micromechanical devices Monitoring systems Noise monitoring quadrature error Robot sensing systems sensing closed-loop Springs step response Temperature Turntables |
| title | Design and Experiment for Dual-mass MEMS Gyroscope Sensing closed-loop System |
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