Design and Experiment for Dual-mass MEMS Gyroscope Sensing closed-loop System

This paper presents a sense mode closed-loop controlling system for micro-electro-mechanical system (MEMS) gyroscopes, and the controller is designed to achieve low error, wide bandwidth and low noise capability. The gyroscope monitoring system includes four independent closed-loop, and is simulated by Simulink soft to prove the speedability and stability of the sensing closed-loop. The system is realized through 3 analog PCBs and is tested on the turntable in temperature oven. The bias stability, angular random walking value and bias temperature coefficients improved from 2.168 °/h, 0.155°/√h and 10.59 °/h/℃ to 0.415 °/h, 0.0414°/√h and 3.59°/h/℃. And the bandwidth value is improved from 13Hz to 104Hz. Meanwhile, scale factor nonlinearity, asymmetry, repeatability and temperature coefficient parameters are enhanced from 660 ppm, 430ppm, 403ppm and 180 ppm/℃ to 59.3ppm, 62.4ppm, 50.4ppm and 28.7 ppm/℃ respectively.