Substrate pump NMOS for ESD protection applications

Substrate pump NMOS for ESD protection applications

The use of a substrate pump to achieve uniform npn protection in a multi-finger NMOS is reported for advanced CMOS technologies with silicide. The novel feature of this device technique is the implementation of a floating guardring to effectively pump the local substrate of the protection NMOS. SPIC...

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Bibliographische Detailangaben
Hauptverfasser: Duvvury, C., Ramaswamy, S., Amerasekera, A., Cline, R.A., Andresen, B.H., Gupta, V.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Circuits
CMOS technology
Diodes
Electrostatic discharge
MOS capacitors
MOS devices
Protection
Resistors
Robustness
Silicides
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Beschreibung
Zusammenfassung:The use of a substrate pump to achieve uniform npn protection in a multi-finger NMOS is reported for advanced CMOS technologies with silicide. The novel feature of this device technique is the implementation of a floating guardring to effectively pump the local substrate of the protection NMOS. SPICE simulations are presented to illustrate the device concept as well as the device design optimization.
DOI:10.1109/EOSESD.2000.890022