Ultra-Large-Coupling and Spurious-Free SH0 Plate Acoustic Wave Resonators Based on Thin LiNbO3
This study lays a foundation for the design of the SH 0 plate acoustic wave (PAW) resonators based on LiNbO 3 plate, and are applicable to the ultra-wideband filters and next-generation tunable filters. The coupling coefficient (k 2 ) of SH 0 mode is optimized to as high as 55% and wideband spurious...
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Veröffentlicht in: | IEEE transactions on ultrasonics, ferroelectrics, and frequency control ferroelectrics, and frequency control, 2020-02, Vol.67 (2), p.374-386 |
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Hauptverfasser: | , , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | This study lays a foundation for the design of the SH 0 plate acoustic wave (PAW) resonators based on LiNbO 3 plate, and are applicable to the ultra-wideband filters and next-generation tunable filters. The coupling coefficient (k 2 ) of SH 0 mode is optimized to as high as 55% and wideband spurious are well controlled by analyzing the propagation characteristics of plate modes in LiNbO 3 . The SH 0 mode is demonstrated to be slowly dispersive and features the superiority of interdigital transducer (IDT)-defining frequency over most other plate modes. On the device level, the transducer types and electrode materials are investigated and compared. In addition, for edge-reflected SH0 resonators, stopband dispersion analysis is provided and the longitudinal ripples are suppressed. For edge-reflected SH0 resonators, a novel perfect edge reflector is proposed with elimination of longitudinal spurious ripples. |
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ISSN: | 0885-3010 1525-8955 |
DOI: | 10.1109/TUFFC.2019.2944302 |