Ultrathin diamondlike carbon films deposited by filtered carbon vacuum arcs
Ultrathin (1 kA) in a pulsed mode. Macroparticle elimination is virtually achieved while plasma throughput is very high. Ultrathin ta-C films have been synthesized using S-filter and Twist Filter systems. Film properties such as hardness, elastic modulus, wear and corrosion resistance have been test...
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| container_end_page | 547 vol.2 |
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| creator | Anders, A. Ryan, F.W. Fong, W. Bhatia, C.S. |
| description | Ultrathin (1 kA) in a pulsed mode. Macroparticle elimination is virtually achieved while plasma throughput is very high. Ultrathin ta-C films have been synthesized using S-filter and Twist Filter systems. Film properties such as hardness, elastic modulus, wear and corrosion resistance have been tested. |
| doi_str_mv | 10.1109/DEIV.2000.879046 |
| format | Conference Proceeding |
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These films can be used as overcoats to protect the magnetic layer. Tetrahedrally bonded amorphous carbon (ta-C) films can be produced by filtered cathodic arc deposition, however, these films will be accepted by the storage industry only if the "macroparticle" issue can be solved. Better plasma filters have been developed. Emphasis is put on the promising Twist Filter system, a compact, open-architecture structure that operates with very high current (>1 kA) in a pulsed mode. Macroparticle elimination is virtually achieved while plasma throughput is very high. Ultrathin ta-C films have been synthesized using S-filter and Twist Filter systems. Film properties such as hardness, elastic modulus, wear and corrosion resistance have been tested.</description><identifier>ISBN: 0780357914</identifier><identifier>ISBN: 9780780357914</identifier><identifier>DOI: 10.1109/DEIV.2000.879046</identifier><language>eng</language><publisher>IEEE</publisher><subject>Amorphous magnetic materials ; Amorphous materials ; Bonding ; Diamond-like carbon ; Filters ; Magnetic films ; Magnetic memory ; Magnetic separation ; Plasma applications ; Protection</subject><ispartof>Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. 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No.00CH37041)</title><addtitle>DEIV</addtitle><description>Ultrathin (<5 nm) hard carbon films are of great interest to the magnetic storage industry as the areal density approaches 100 Gb/in/sup 2/. These films can be used as overcoats to protect the magnetic layer. Tetrahedrally bonded amorphous carbon (ta-C) films can be produced by filtered cathodic arc deposition, however, these films will be accepted by the storage industry only if the "macroparticle" issue can be solved. Better plasma filters have been developed. Emphasis is put on the promising Twist Filter system, a compact, open-architecture structure that operates with very high current (>1 kA) in a pulsed mode. Macroparticle elimination is virtually achieved while plasma throughput is very high. Ultrathin ta-C films have been synthesized using S-filter and Twist Filter systems. Film properties such as hardness, elastic modulus, wear and corrosion resistance have been tested.</description><subject>Amorphous magnetic materials</subject><subject>Amorphous materials</subject><subject>Bonding</subject><subject>Diamond-like carbon</subject><subject>Filters</subject><subject>Magnetic films</subject><subject>Magnetic memory</subject><subject>Magnetic separation</subject><subject>Plasma applications</subject><subject>Protection</subject><isbn>0780357914</isbn><isbn>9780780357914</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2000</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotT11LwzAUDYigzr2LT_kDrTdNmo9HmVOHA1-mr-O2ucFo242kE_bvrWxP55MDh7E7AaUQ4B6elqvPsgKA0hoHSl-wGzAWZG2cUFdsnvP3FIKqldHmmr19dGPC8SsO3Efsd4Pv4g_xFlOzG3iIXZ-5p_0ux5E8b47_1khp4ufKL7aHQ88xtfmWXQbsMs3POGOb5-Vm8Vqs319Wi8d1EbXQhQV0rvICSGqsvVIWQh2MCb7xk5wo2sY6KSxBayUQVUpY0EhatMEoOWP3p9lIRNt9ij2m4_b0Vv4BEbdLLg</recordid><startdate>2000</startdate><enddate>2000</enddate><creator>Anders, A.</creator><creator>Ryan, F.W.</creator><creator>Fong, W.</creator><creator>Bhatia, C.S.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>2000</creationdate><title>Ultrathin diamondlike carbon films deposited by filtered carbon vacuum arcs</title><author>Anders, A. ; Ryan, F.W. ; Fong, W. ; Bhatia, C.S.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i616-80a992d10e36a5d4480f5f77fdbd5d45f7a8b89318e0c830ee241806ae61cf743</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2000</creationdate><topic>Amorphous magnetic materials</topic><topic>Amorphous materials</topic><topic>Bonding</topic><topic>Diamond-like carbon</topic><topic>Filters</topic><topic>Magnetic films</topic><topic>Magnetic memory</topic><topic>Magnetic separation</topic><topic>Plasma applications</topic><topic>Protection</topic><toplevel>online_resources</toplevel><creatorcontrib>Anders, A.</creatorcontrib><creatorcontrib>Ryan, F.W.</creatorcontrib><creatorcontrib>Fong, W.</creatorcontrib><creatorcontrib>Bhatia, C.S.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Anders, A.</au><au>Ryan, F.W.</au><au>Fong, W.</au><au>Bhatia, C.S.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Ultrathin diamondlike carbon films deposited by filtered carbon vacuum arcs</atitle><btitle>Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041)</btitle><stitle>DEIV</stitle><date>2000</date><risdate>2000</risdate><volume>2</volume><spage>541</spage><epage>547 vol.2</epage><pages>541-547 vol.2</pages><isbn>0780357914</isbn><isbn>9780780357914</isbn><abstract>Ultrathin (<5 nm) hard carbon films are of great interest to the magnetic storage industry as the areal density approaches 100 Gb/in/sup 2/. These films can be used as overcoats to protect the magnetic layer. Tetrahedrally bonded amorphous carbon (ta-C) films can be produced by filtered cathodic arc deposition, however, these films will be accepted by the storage industry only if the "macroparticle" issue can be solved. Better plasma filters have been developed. Emphasis is put on the promising Twist Filter system, a compact, open-architecture structure that operates with very high current (>1 kA) in a pulsed mode. Macroparticle elimination is virtually achieved while plasma throughput is very high. Ultrathin ta-C films have been synthesized using S-filter and Twist Filter systems. Film properties such as hardness, elastic modulus, wear and corrosion resistance have been tested.</abstract><pub>IEEE</pub><doi>10.1109/DEIV.2000.879046</doi><oa>free_for_read</oa></addata></record> |
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| ispartof | Proceedings ISDEIV. 19th International Symposium on Discharges and Electrical Insulation in Vacuum (Cat. No.00CH37041), 2000, Vol.2, p.541-547 vol.2 |
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| language | eng |
| recordid | cdi_ieee_primary_879046 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Amorphous magnetic materials Amorphous materials Bonding Diamond-like carbon Filters Magnetic films Magnetic memory Magnetic separation Plasma applications Protection |
| title | Ultrathin diamondlike carbon films deposited by filtered carbon vacuum arcs |
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