Ultrathin diamondlike carbon films deposited by filtered carbon vacuum arcs

Ultrathin diamondlike carbon films deposited by filtered carbon vacuum arcs

Ultrathin (1 kA) in a pulsed mode. Macroparticle elimination is virtually achieved while plasma throughput is very high. Ultrathin ta-C films have been synthesized using S-filter and Twist Filter systems. Film properties such as hardness, elastic modulus, wear and corrosion resistance have been test...

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Bibliographische Detailangaben
Hauptverfasser: Anders, A., Ryan, F.W., Fong, W., Bhatia, C.S.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Amorphous magnetic materials
Amorphous materials
Bonding
Diamond-like carbon
Filters
Magnetic films
Magnetic memory
Magnetic separation
Plasma applications
Protection
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Beschreibung
Zusammenfassung:Ultrathin (1 kA) in a pulsed mode. Macroparticle elimination is virtually achieved while plasma throughput is very high. Ultrathin ta-C films have been synthesized using S-filter and Twist Filter systems. Film properties such as hardness, elastic modulus, wear and corrosion resistance have been tested.
DOI:10.1109/DEIV.2000.879046