Miniaturization of sensors and influence of their thermal noise on measurement accuracy

The influence of thermal fluctuations in the mechanical and electrical elements of microsensors on their measurement accuracy is considered. The limits of the minimum attainable measurement uncertainty as a function of the miniaturization degree of the sensor are evaluated. Possibilities of improvement of the sensor performance through optimal fitting of the sensor and ADC parameters are examined. Recommendations for an optimal choice of parameters of the analog part of the sensor as well of the ADC resolution are given. The analysis is based on the information-energetic theory of measurements, and on general results of statistical physics.