Characterization of the MIC/MILC interface and its effects on the performance of MILC thin-film transistors

Process and material characterization of the crystallization of amorphous silicon by metal-induced crystallization (MIC) and metal-induced lateral crystallization (MILC) using evaporated Ni has been performed. An activation energy of about 2 eV has been obtained for the MILC rate. The Ni content in...

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Veröffentlicht in:	IEEE transactions on electron devices 2000-05, Vol.47 (5), p.1061-1067
Hauptverfasser:	Man Wong, Zhonghe Jin, Bhat, G.A., Wong, P.C., Hoi Sing Kwok
Format:	Artikel
Sprache:	eng
Schlagworte:	Crystal structure Crystallization Evaporation Grain boundaries Nickel Scanning Semiconductor devices Silicon Solid solubility Thin films
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