A Novel PZT-Based Traveling-Wave Micromotor With High Performance and Unconstrained Coaxial Rotation

Traveling-wave ultrasonic micromotor is a promising technology for microactuation and nanopositioning. A special designed annular stator was proposed with the combination of two separate buffer structures to achieve high performance. Traveling-wave propagation with moving antinodes was observed and...

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Veröffentlicht in:Journal of microelectromechanical systems 2018-08, Vol.27 (4), p.635-642
Hauptverfasser: Qin, Feng, Dai, Gang, Sun, Xiangyu, Xu, Qinyin, Du, Yijia, Bao, Jingfu
Format: Artikel
Sprache:eng
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Zusammenfassung:Traveling-wave ultrasonic micromotor is a promising technology for microactuation and nanopositioning. A special designed annular stator was proposed with the combination of two separate buffer structures to achieve high performance. Traveling-wave propagation with moving antinodes was observed and analyzed. The fabricated stator exhibits large displacement of 4.71~\mu \text{m} at 1 V and high quality factor of 220 with the central frequency of 101.6 kHz. The assembled rotor was actuated, and controllable rotate speed was achieved. The measured maximum torque reached to 2.63~\mu Nm at 1.3 V and 101 kHz. Besides, unconstraint rotation with no lateral slip was found during the entire rotation process, indicating stable, uniform, and highly reliable actuation of the micromotor. [2018-0026]
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2018.2834541