An anode hole injection percolation model for oxide breakdown-the "doom's day" scenario revisited

An anode hole injection percolation model for oxide breakdown-the "doom's day" scenario revisited

A comprehensive percolation model is used to explore the role of non-uniform trap generation process on oxide breakdown. We show that this non-uniform trap generation (due to SILC and roughness induced localization) makes interpretation of experimental data difficult and can lead to incorrect projec...

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Hauptverfasser: Alam, M.A., Bude, J., Weir, B., Silverman, P., Ghetti, A., Monroe, D., Cheung, K.P., Moccio, S.
Format: Tagungsbericht
Sprache:eng ; jpn
Schlagworte:
Anodes
Electric breakdown
Electron traps
Feedback
Lead compounds
Predictive models
Rough surfaces
Stress
Surface roughness
Tunneling
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Zusammenfassung:A comprehensive percolation model is used to explore the role of non-uniform trap generation process on oxide breakdown. We show that this non-uniform trap generation (due to SILC and roughness induced localization) makes interpretation of experimental data difficult and can lead to incorrect projections for reliability of ultra-thin oxides.
DOI:10.1109/IEDM.1999.824251