IMEMS accelerometer testing-test laboratory development and usage

An economical IMEMS accelerometer test lab was developed by adding acceleration stimulation equipment to an IC test lab. This paper will describe an R&D approach to testing these accelerometers. Descriptions and usage of the equipment are presented. Accelerometer pulse stream data and their anal...

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Bibliographische Detailangaben
Hauptverfasser: Beegle, R.W., Brocato, R.W., Grant, R.W.
Format: Tagungsbericht
Sprache:eng
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Beschreibung
Zusammenfassung:An economical IMEMS accelerometer test lab was developed by adding acceleration stimulation equipment to an IC test lab. This paper will describe an R&D approach to testing these accelerometers. Descriptions and usage of the equipment are presented. Accelerometer pulse stream data and their analysis are described. A production test facility is being developed from this work.
ISSN:1089-3539
2378-2250
DOI:10.1109/TEST.1999.805648