Terahertz Line Defect Waveguide Based on Silicon-on-Glass Technology

In this paper, based on silicon-on-glass technology, a new THz dielectric waveguide structure is proposed. The proposed waveguide is low loss, and has a mechanically stable structure. The new waveguide is scalable to higher frequencies in THz band. Theoretical and experimental results for 500 to 700...

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Veröffentlicht in:	IEEE transactions on terahertz science and technology 2017-07, Vol.7 (4), p.433-439
Hauptverfasser:	Amarloo, Hadi, Safavi-Naeini, Safieddin
Format:	Artikel
Sprache:	eng
Schlagworte:	Conductivity Dielectrics Etching Glass High resistivity silicon line defect waveguide Optical waveguides Photonic band gap Rectangular waveguides Sensors Silicon THz dielectric waveguide
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Beschreibung
Zusammenfassung:	In this paper, based on silicon-on-glass technology, a new THz dielectric waveguide structure is proposed. The proposed waveguide is low loss, and has a mechanically stable structure. The new waveguide is scalable to higher frequencies in THz band. Theoretical and experimental results for 500 to 700 GHz frequency range are presented. The introduced waveguide can be a platform for highly sensitive integrated THz sensors.
ISSN:	2156-342X 2156-3446
DOI:	10.1109/TTHZ.2017.2708505