The spatial distribution of polarization and space charge in sputtered PZT thin films

In this work, the laser-intensity-modulation method (LIMM), e.g. the measurement of a pyroelectric current caused by the interaction of thermal waves generated by an intensity modulated laser and the spatially distributed polarization and space charge, and capacitance-voltage characteristics are use...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Suchaneck, G., Sandner, T., Kohler, R., Padmini, P., Gerlach, G., Afanasjev, V.P., Tarakanov, E.A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Capacitance-voltage characteristics Ceramics Polarization Pyroelectricity Semiconductor thin films Space charge Sputtering Substrates Temperature Thin film sensors
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!