The spatial distribution of polarization and space charge in sputtered PZT thin films

In this work, the laser-intensity-modulation method (LIMM), e.g. the measurement of a pyroelectric current caused by the interaction of thermal waves generated by an intensity modulated laser and the spatially distributed polarization and space charge, and capacitance-voltage characteristics are used for a separate polarization and space charge determination for sputtered PZT films. Assumptions concerning the nature of the space charge centers were made.