Precise Measurement of Inhomogeneity of 2-D System by Six-Point Method

Nondestructive, quantitative determination of inhomogeneity degree of 2-D system by the measurement of electrical properties is presented. Six point contacts have to be located at arbitrary positions on the sample edge. The sheet resistivity and the inhomogeneity parameter are determined simultaneously by the measurement of nine so-called four-probe resistances. The method is global, i.e., the local inhomogeneity will be always detected irrespectively of their location.