Ion-beam assisted deposition of bi-axially aligned MgO template films for YBCO coated conductors

Ion-beam assisted deposition of bi-axially aligned MgO template films for YBCO coated conductors

We report the results of experiments with ion-beam-assisted deposition (IBAD) of MgO using in-situ monitoring with Reflected High-Energy Electron Diffraction (RHEED). Strips of polished Haynes 242 and Inconel 625 nickel-based super-alloys have been used as substrates for these experiments. The in-pl...

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Veröffentlicht in:IEEE transactions on applied superconductivity 1999-06, Vol.9 (2), p.1964-1966
Hauptverfasser: Groves, J.R., Arendt, P.N., Foltyn, S.R., DePaula, R.F., Peterson, E.J., Holesinger, T.G., Coulter, J.Y., Springer, R.W., Wang, C.P., Hammond, R.H.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Buffer layers
Electronics
Electrons
Exact sciences and technology
Microelectronic fabrication (materials and surfaces technology)
Monitoring
Optical films
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Strips
Substrates
Superconducting devices
Superconducting epitaxial layers
Superconducting films
Superconducting integrated circuits
X-ray diffraction
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Zusammenfassung:We report the results of experiments with ion-beam-assisted deposition (IBAD) of MgO using in-situ monitoring with Reflected High-Energy Electron Diffraction (RHEED). Strips of polished Haynes 242 and Inconel 625 nickel-based super-alloys have been used as substrates for these experiments. The in-plane texture of the MgO, as measured by X-ray /spl phi/ scan, resulted in FWHM values between 11 and 15/spl deg/. Using pulsed-laser deposition, the IBAD MgO template films were then overcoated with buffer layer films and a final superconducting film of YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta//. The best superconducting transport properties measured on these YBCO films were: an Ic (75 K, self-field, 1 cm wide) of 41.6 A, and a narrow-bridge J/sub c/ (1.35 /spl mu/m thick film) of 0.46 MA/cm/sup 2/.
ISSN:1051-8223
1558-2515
DOI:10.1109/77.784846