Microarray selective epitaxy (MASE) for integrated photonic devices

Microarray selective epitaxy (MASE) for integrated photonic devices

We developed a novel technique, called microarray selective epitaxy (MASE), for selectively growing extremely small PICs. MASE can form densely arrayed (pitch

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Bibliographische Detailangaben
Hauptverfasser: Kudo, K., Nakazaki, T., Yamaguchi, M.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Epitaxial growth
Etching
Optical add-drop multiplexers
Optical devices
Optical waveguides
Photonic integrated circuits
Quantum well devices
Semiconductor waveguides
Temperature measurement
Wavelength division multiplexing
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Beschreibung
Zusammenfassung:We developed a novel technique, called microarray selective epitaxy (MASE), for selectively growing extremely small PICs. MASE can form densely arrayed (pitch
ISSN:1092-8669
DOI:10.1109/ICIPRM.1999.773752