Pigment-dispersed color resist with high resolution for advanced color filter application
A positive working pigment-dispersed color resist comprising organic pigments and a chemically amplified resist system is designed for a high resolution color filter with fine patterns of less than 5 /spl mu/m lines and spaces. It also shows high brightness and good color reproducibility. An acrylic...
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| Format: | Tagungsbericht |
| Sprache: | eng |
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| Zusammenfassung: | A positive working pigment-dispersed color resist comprising organic pigments and a chemically amplified resist system is designed for a high resolution color filter with fine patterns of less than 5 /spl mu/m lines and spaces. It also shows high brightness and good color reproducibility. An acrylic binder including an acid labile group and an aromatic function group that have both functions of acid catalysed unblocking and good compatibility with pigments is also synthesized. |
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| DOI: | 10.1109/ASID.1999.762781 |