Measurement of elastic properties of thin film ZnO by resonance method

Measurement of elastic properties of thin film ZnO by resonance method

The elastic properties of thin film ZnO have been measured by attaching a Si-ZnO strip to a ceramic bimorph, deflecting the latter with an electric signal and measuring the resonance frequencies of the Si-ZnO strip which are determined by the elastic moduli of ZnO and Si. The elastic modulus of Si i...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Jade, S.A., Smits, J.G.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Ceramics
Electric variables measurement
Frequency measurement
Joining processes
Resonance
Resonant frequency
Semiconductor thin films
Strips
Transistors
Zinc oxide
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Beschreibung
Zusammenfassung:The elastic properties of thin film ZnO have been measured by attaching a Si-ZnO strip to a ceramic bimorph, deflecting the latter with an electric signal and measuring the resonance frequencies of the Si-ZnO strip which are determined by the elastic moduli of ZnO and Si. The elastic modulus of Si is known and hence, from the resonance frequency of the beam, the elastic modulus of ZnO can be calculated. Results obtained are presented in this report.
ISSN:1051-0117
DOI:10.1109/ULTSYM.1998.762213