Laser power monitoring using MEMS micromirror technology

Laser power monitoring using MEMS micromirror technology

We have fabricated and characterized fiberized MEMS in situ power monitor chips in which a surface-micromachined out-of-plane micromirror partially reflects the incident multimode light to an on-chip fiber tap. Reflectivity and transmittivity were measured as a function of time at various increasing...

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Hauptverfasser: Agarwal, A., Arney, S., Barber, B.P., Kosinski, S.G., LeGrange, J.D., Raju, V.R., Ruel, R.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Fiber lasers
Micromechanical devices
Micromirrors
Monitoring
Optical materials
Power lasers
Power measurement
Reflectivity
Semiconductor device measurement
Time measurement
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Beschreibung
Zusammenfassung:We have fabricated and characterized fiberized MEMS in situ power monitor chips in which a surface-micromachined out-of-plane micromirror partially reflects the incident multimode light to an on-chip fiber tap. Reflectivity and transmittivity were measured as a function of time at various increasing incident optical power levels, and for various material systems. The first prototypes show stability to hundreds of milliwatts.
DOI:10.1109/RELPHY.1999.761612