Development of adhesion promoters to enhance polymer/substrate interface toughness
The adhesion performance of photo-BCB coatings were investigated using a new adhesion promoter, AP-3000, based on vinyltriacetoxysilane (VTAS) chemistry. A modified edge lift-off test (m-ELT) was employed to evaluate adhesion performance of photo-BCB on various surfaces: Si, SiN, Cu, and Al. Use of...
Gespeichert in:
Hauptverfasser: | , , , , , , |
---|---|
Format: | Tagungsbericht |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | The adhesion performance of photo-BCB coatings were investigated using a new adhesion promoter, AP-3000, based on vinyltriacetoxysilane (VTAS) chemistry. A modified edge lift-off test (m-ELT) was employed to evaluate adhesion performance of photo-BCB on various surfaces: Si, SiN, Cu, and Al. Use of AP-3000 resulted in a large improvement of adhesion energies for these interfaces. Atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) of these interfaces showed cohesive interfacial failure into the photo-BCB phase. The interfacial fracture energies approached the fracture toughness of photo-BCB, ca. 45 J/m/sup 2/. |
---|---|
DOI: | 10.1109/ISAPM.1999.757286 |