Parasitic Gate Resistance Impact on Triple-Gate FinFET CMOS Inverter

In this paper, based on a full intrinsic-extrinsic model for symmetric doped double-gate MOSFET, we analyze the impact of FinFET gate resistance over the inverter and ring oscillator performance. It is shown that, when the total number of fins remains constant, the propagation delay can be improved thanks to the multifinger configuration that translates into the gate resistance reduction. Furthermore, the fin spacing in addition to source/drain fin extension reduction are of primary importance to improve the digital circuit performance.