VHF free-free beam high-Q micromechanical resonators
Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q's as high as 8,400 at VHF frequencies from 30-90 MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support s...
Gespeichert in:
| Hauptverfasser: | , , , |
|---|---|
| Format: | Tagungsbericht |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 458 |
|---|---|
| container_issue | |
| container_start_page | 453 |
| container_title | |
| container_volume | |
| creator | Kun Wang Yinglei Yu Ark-Chew Wong Nguyen, C.T.-C. |
| description | Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q's as high as 8,400 at VHF frequencies from 30-90 MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these resonators to achieve high Q with high stiffness in the VHF frequency range. |
| doi_str_mv | 10.1109/MEMSYS.1999.746871 |
| format | Conference Proceeding |
| fullrecord | <record><control><sourceid>ieee_6IE</sourceid><recordid>TN_cdi_ieee_primary_746871</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>746871</ieee_id><sourcerecordid>746871</sourcerecordid><originalsourceid>FETCH-LOGICAL-c153t-5125021d4f53802891cb9ff8276b4065fdfd126251cde030cb76eafa5c6e5ae53</originalsourceid><addsrcrecordid>eNotj81KAzEURgMq2FZfoKt5gYz35j9LKa0VWkSqgquSydw4kU5HMt349ip1853FgQMfY3OEGhH83Xa53b3vavTe11YZZ_GCTcE6kBq9gks2QXCKm19_zabj-AkgAJWfMPW2XlWpEPG_qRoKfdXlj44_V32OZegpduGYYzhUhcbhGE5DGW_YVQqHkW7_OWOvq-XLYs03Tw-Pi_sNj6jliWsUGgS2KmnpQDiPsfEpOWFNo8Do1KYWhREaY0sgITbWUEhBR0M6kJYzNj93MxHtv0ruQ_nenw_KHwN0RDc</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>VHF free-free beam high-Q micromechanical resonators</title><source>IEEE Electronic Library (IEL) Conference Proceedings</source><creator>Kun Wang ; Yinglei Yu ; Ark-Chew Wong ; Nguyen, C.T.-C.</creator><creatorcontrib>Kun Wang ; Yinglei Yu ; Ark-Chew Wong ; Nguyen, C.T.-C.</creatorcontrib><description>Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q's as high as 8,400 at VHF frequencies from 30-90 MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these resonators to achieve high Q with high stiffness in the VHF frequency range.</description><identifier>ISSN: 1084-6999</identifier><identifier>ISBN: 0780351940</identifier><identifier>ISBN: 9780780351943</identifier><identifier>DOI: 10.1109/MEMSYS.1999.746871</identifier><language>eng</language><publisher>IEEE</publisher><subject>Capacitors ; Electric variables measurement ; Electrodes ; Frequency measurement ; Isolation technology ; Microcavities ; Micromachining ; Micromechanical devices ; Springs ; VHF circuits</subject><ispartof>Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), 1999, p.453-458</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c153t-5125021d4f53802891cb9ff8276b4065fdfd126251cde030cb76eafa5c6e5ae53</citedby></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/746871$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,776,780,785,786,2052,4036,4037,27902,54895</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/746871$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Kun Wang</creatorcontrib><creatorcontrib>Yinglei Yu</creatorcontrib><creatorcontrib>Ark-Chew Wong</creatorcontrib><creatorcontrib>Nguyen, C.T.-C.</creatorcontrib><title>VHF free-free beam high-Q micromechanical resonators</title><title>Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)</title><addtitle>MEMSYS</addtitle><description>Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q's as high as 8,400 at VHF frequencies from 30-90 MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these resonators to achieve high Q with high stiffness in the VHF frequency range.</description><subject>Capacitors</subject><subject>Electric variables measurement</subject><subject>Electrodes</subject><subject>Frequency measurement</subject><subject>Isolation technology</subject><subject>Microcavities</subject><subject>Micromachining</subject><subject>Micromechanical devices</subject><subject>Springs</subject><subject>VHF circuits</subject><issn>1084-6999</issn><isbn>0780351940</isbn><isbn>9780780351943</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>1999</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><sourceid>RIE</sourceid><recordid>eNotj81KAzEURgMq2FZfoKt5gYz35j9LKa0VWkSqgquSydw4kU5HMt349ip1853FgQMfY3OEGhH83Xa53b3vavTe11YZZ_GCTcE6kBq9gks2QXCKm19_zabj-AkgAJWfMPW2XlWpEPG_qRoKfdXlj44_V32OZegpduGYYzhUhcbhGE5DGW_YVQqHkW7_OWOvq-XLYs03Tw-Pi_sNj6jliWsUGgS2KmnpQDiPsfEpOWFNo8Do1KYWhREaY0sgITbWUEhBR0M6kJYzNj93MxHtv0ruQ_nenw_KHwN0RDc</recordid><startdate>1999</startdate><enddate>1999</enddate><creator>Kun Wang</creator><creator>Yinglei Yu</creator><creator>Ark-Chew Wong</creator><creator>Nguyen, C.T.-C.</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>1999</creationdate><title>VHF free-free beam high-Q micromechanical resonators</title><author>Kun Wang ; Yinglei Yu ; Ark-Chew Wong ; Nguyen, C.T.-C.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c153t-5125021d4f53802891cb9ff8276b4065fdfd126251cde030cb76eafa5c6e5ae53</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>1999</creationdate><topic>Capacitors</topic><topic>Electric variables measurement</topic><topic>Electrodes</topic><topic>Frequency measurement</topic><topic>Isolation technology</topic><topic>Microcavities</topic><topic>Micromachining</topic><topic>Micromechanical devices</topic><topic>Springs</topic><topic>VHF circuits</topic><toplevel>online_resources</toplevel><creatorcontrib>Kun Wang</creatorcontrib><creatorcontrib>Yinglei Yu</creatorcontrib><creatorcontrib>Ark-Chew Wong</creatorcontrib><creatorcontrib>Nguyen, C.T.-C.</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Electronic Library (IEL)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kun Wang</au><au>Yinglei Yu</au><au>Ark-Chew Wong</au><au>Nguyen, C.T.-C.</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>VHF free-free beam high-Q micromechanical resonators</atitle><btitle>Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)</btitle><stitle>MEMSYS</stitle><date>1999</date><risdate>1999</risdate><spage>453</spage><epage>458</epage><pages>453-458</pages><issn>1084-6999</issn><isbn>0780351940</isbn><isbn>9780780351943</isbn><abstract>Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q's as high as 8,400 at VHF frequencies from 30-90 MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these resonators to achieve high Q with high stiffness in the VHF frequency range.</abstract><pub>IEEE</pub><doi>10.1109/MEMSYS.1999.746871</doi><tpages>6</tpages></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | ISSN: 1084-6999 |
| ispartof | Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291), 1999, p.453-458 |
| issn | 1084-6999 |
| language | eng |
| recordid | cdi_ieee_primary_746871 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Capacitors Electric variables measurement Electrodes Frequency measurement Isolation technology Microcavities Micromachining Micromechanical devices Springs VHF circuits |
| title | VHF free-free beam high-Q micromechanical resonators |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-19T07%3A42%3A40IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_6IE&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=VHF%20free-free%20beam%20high-Q%20micromechanical%20resonators&rft.btitle=Technical%20Digest.%20IEEE%20International%20MEMS%2099%20Conference.%20Twelfth%20IEEE%20International%20Conference%20on%20Micro%20Electro%20Mechanical%20Systems%20(Cat.%20No.99CH36291)&rft.au=Kun%20Wang&rft.date=1999&rft.spage=453&rft.epage=458&rft.pages=453-458&rft.issn=1084-6999&rft.isbn=0780351940&rft.isbn_list=9780780351943&rft_id=info:doi/10.1109/MEMSYS.1999.746871&rft_dat=%3Cieee_6IE%3E746871%3C/ieee_6IE%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=746871&rfr_iscdi=true |