VHF free-free beam high-Q micromechanical resonators

VHF free-free beam high-Q micromechanical resonators

Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q's as high as 8,400 at VHF frequencies from 30-90 MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support s...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kun Wang, Yinglei Yu, Ark-Chew Wong, Nguyen, C.T.-C.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Capacitors
Electric variables measurement
Electrodes
Frequency measurement
Isolation technology
Microcavities
Micromachining
Micromechanical devices
Springs
VHF circuits
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Beschreibung
Zusammenfassung:Free-free beam, flexural-mode, micromechanical resonators utilizing non-intrusive supports to achieve measured Q's as high as 8,400 at VHF frequencies from 30-90 MHz are demonstrated in a polysilicon surface micromachining technology. The subject microresonators feature torsional-mode support springs that effectively isolate the resonator beam from its anchors via quarter-wavelength impedance transformations, minimizing anchor dissipation and allowing these resonators to achieve high Q with high stiffness in the VHF frequency range.
ISSN:1084-6999
DOI:10.1109/MEMSYS.1999.746871