Prediction of thermal resistance in trench isolated bipolar device structures
A model is proposed for predicting the thermal resistance of a trench isolated device structure. The model prediction for Nortel's 0.35 /spl mu/m trench isolated 35 GHz f/sub T/ bipolar process is found to be within an average of 5% of measured values for three different emitter lengths over tw...
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| creator | Walkey, D.J. Smy, T.J. Tran, H. Marchesan, D. Schroter, M. |
| description | A model is proposed for predicting the thermal resistance of a trench isolated device structure. The model prediction for Nortel's 0.35 /spl mu/m trench isolated 35 GHz f/sub T/ bipolar process is found to be within an average of 5% of measured values for three different emitter lengths over two wafers. |
| doi_str_mv | 10.1109/BIPOL.1998.741926 |
| format | Conference Proceeding |
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No.98CH36198)</btitle><stitle>BIPOL</stitle><date>1998</date><risdate>1998</risdate><spage>207</spage><epage>210</epage><pages>207-210</pages><issn>1088-9299</issn><eissn>2378-590X</eissn><isbn>0780344979</isbn><isbn>9780780344976</isbn><abstract>A model is proposed for predicting the thermal resistance of a trench isolated device structure. The model prediction for Nortel's 0.35 /spl mu/m trench isolated 35 GHz f/sub T/ bipolar process is found to be within an average of 5% of measured values for three different emitter lengths over two wafers.</abstract><pub>IEEE</pub><doi>10.1109/BIPOL.1998.741926</doi><tpages>4</tpages></addata></record> |
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| ispartof | Proceedings of the 1998 Bipolar/BiCMOS Circuits and Technology Meeting (Cat. No.98CH36198), 1998, p.207-210 |
| issn | 1088-9299 2378-590X |
| language | eng |
| recordid | cdi_ieee_primary_741926 |
| source | IEEE Electronic Library (IEL) Conference Proceedings |
| subjects | Electrical resistance measurement Geometry Integral equations Power generation Predictive models Semiconductor device modeling Solid modeling Temperature Thermal conductivity Thermal resistance |
| title | Prediction of thermal resistance in trench isolated bipolar device structures |
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