Ultra-high speed CMOS circuits in thin SIMOX films

CMOS dual-modulus prescaler circuits were built in very thin SIMOX films. They operate at 6.2 GHz, the highest speed ever reported for a digital CMOS circuit and 50% faster than the control circuits built in bulk Si. The high speed is obtained by taking advantage of the intrinsic properties of the S...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kamgar, A., Hillenius, S.J., Cong, H.-I., Field, R.L., Lindenberger, W.S., Celler, G.K., Trimble, L.E., Sturm, J.C.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Annealing Capacitance CMOS digital integrated circuits CMOS process CMOS technology Counting circuits Fabrication Optical feedback Semiconductor films Temperature
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