Ultra-high speed CMOS circuits in thin SIMOX films

CMOS dual-modulus prescaler circuits were built in very thin SIMOX films. They operate at 6.2 GHz, the highest speed ever reported for a digital CMOS circuit and 50% faster than the control circuits built in bulk Si. The high speed is obtained by taking advantage of the intrinsic properties of the S...

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Hauptverfasser: Kamgar, A., Hillenius, S.J., Cong, H.-I., Field, R.L., Lindenberger, W.S., Celler, G.K., Trimble, L.E., Sturm, J.C.
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creator Kamgar, A.
Hillenius, S.J.
Cong, H.-I.
Field, R.L.
Lindenberger, W.S.
Celler, G.K.
Trimble, L.E.
Sturm, J.C.
description CMOS dual-modulus prescaler circuits were built in very thin SIMOX films. They operate at 6.2 GHz, the highest speed ever reported for a digital CMOS circuit and 50% faster than the control circuits built in bulk Si. The high speed is obtained by taking advantage of the intrinsic properties of the SOI (silicon-on-insulator) structure combined with the symmetric CMOS technology that simultaneously optimizes the characteristics of both the p- and n-channel transistors.< >
doi_str_mv 10.1109/IEDM.1989.74181
format Conference Proceeding
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identifier ISSN: 0163-1918
ispartof International Technical Digest on Electron Devices Meeting, 1989, p.829-832
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2156-017X
language eng
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Annealing
Capacitance
CMOS digital integrated circuits
CMOS process
CMOS technology
Counting circuits
Fabrication
Optical feedback
Semiconductor films
Temperature
title Ultra-high speed CMOS circuits in thin SIMOX films
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