Efficient computation of interconnect capacitances using the domain decomposition approach

A novel technique based on the use of the finite difference (FD) method, applied in conjunction with the perfectly matched layer (PML) and impedance boundary conditions for mesh truncation, is combined with the domain decomposition approach to compute the capacitance matrices of complex interconnect configurations in an efficient manner. Both the overlapping and nonoverlapping domain approaches are employed to model the interconnects, and convergence and efficiency issues of the proposed algorithms are examined.