Erratum to "Temperature Dependence of the Elastic Constants of Doped Silicon" [Jun 15 730-741]

Erratum to "Temperature Dependence of the Elastic Constants of Doped Silicon" [Jun 15 730-741]

There is an error in one set of values listed in Table III, page 735. The cell in the 4th row from the bottom (Ring ) and rightmost column (P6.6) should read "-3.05 / -58.10 / 19.46", not "-58.10 / -30.99 / 19.46".

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Veröffentlicht in:Journal of microelectromechanical systems 2015-12, Vol.24 (6), p.2178-2178
Hauptverfasser: Ng, Eldwin J., Hong, Vu A., Yang, Yushi, Ahn, Chae Hyuck, Everhart, Camille L. M., Kenny, Thomas W.
Format: Artikel
Sprache:eng
Schlagworte:
Doping
Elasticity
Elemental semiconductors
Finite element analysis
Silicon
Temperature dependence
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Zusammenfassung:There is an error in one set of values listed in Table III, page 735. The cell in the 4th row from the bottom (Ring ) and rightmost column (P6.6) should read "-3.05 / -58.10 / 19.46", not "-58.10 / -30.99 / 19.46".
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2015.2483373