Chemically reduced lithium niobate single crystals: processing, properties and improvements in SAW device fabrication and performance

Chemically reduced lithium niobate single crystals: processing, properties and improvements in SAW device fabrication and performance

Chemical reduction of lithium niobate yields crystals with enhanced electrical conductivity and optical absorption. The higher conductivity of such crystals makes them less susceptible to pyroelectric charging, which would otherwise present difficulties in SAW device fabrication and operation. The c...

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Bibliographische Detailangaben
Hauptverfasser: Standifer, E.M., Jundt, D.H., Norwood, R.G., Bordui, P.F.
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Chemical processes
Conductivity
Crystals
Electromagnetic wave absorption
Lithium niobate
Optical filters
Pyroelectricity
Surface acoustic wave devices
Surface acoustic waves
Temperature dependence
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Zusammenfassung:Chemical reduction of lithium niobate yields crystals with enhanced electrical conductivity and optical absorption. The higher conductivity of such crystals makes them less susceptible to pyroelectric charging, which would otherwise present difficulties in SAW device fabrication and operation. The crystals' increased near-ultraviolet light absorptivity allows improvements in photolithographic exposure, such as generating narrower and more precise lines.
ISSN:1075-6787
DOI:10.1109/FREQ.1998.717939