Discrete-event simulation of wafer fabrication facility

Using discrete-event simulation (process interaction approach with SIMAN) , we modeled the product flow through a research and experimentation facility for wafer fabrication. The model was verified using past history; it predicts typical cycle times and average operations/day closely. Experiments we...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Pitts, K.A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Discrete event simulation Fabrication Furnaces Implants Integrated circuit modeling Plasma applications Plasma chemistry Predictive models Semiconductor device modeling Wet etching
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