Discrete-event simulation of wafer fabrication facility

Using discrete-event simulation (process interaction approach with SIMAN) , we modeled the product flow through a research and experimentation facility for wafer fabrication. The model was verified using past history; it predicts typical cycle times and average operations/day closely. Experiments we...

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1. Verfasser: Pitts, K.A.
Format: Tagungsbericht
Sprache:eng
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Zusammenfassung:Using discrete-event simulation (process interaction approach with SIMAN) , we modeled the product flow through a research and experimentation facility for wafer fabrication. The model was verified using past history; it predicts typical cycle times and average operations/day closely. Experiments were run with the model to isolate bottlenecks, to determine how best to alleviate the bottlenecks, and to determine the effect of changing system parameters, such as people, equipment, loading, failure rates on equipment, and hours of operation (add a second shift).
DOI:10.1109/WSC.1988.716245