Calibrating ESCA and ellipsometry measurements of perfluoropolyether lubricant thickness

Calibrating ESCA and ellipsometry measurements of perfluoropolyether lubricant thickness

X-ray reflectivity (XRR) has been used as an absolute measurement of the thickness of perfluoropolyether (PFPE) lubricant layers on silicon substrates to determine the validity of thickness measurements by electron spectroscopy for chemical analysis (ESCA) and ellipsometry. Excellent agreement is fo...

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Veröffentlicht in:IEEE transactions on magnetics 1998-07, Vol.34 (4), p.1774-1776
Hauptverfasser: Toney, M.F., Mate, C.M., Pocker, D.
Format: Artikel
Sprache:eng
Schlagworte:
Applied sciences
Chemical analysis
Electronics
Electrons
Ellipsometry
Exact sciences and technology
Lubricants
Magnetic devices
Optical films
Other magnetic recording and storage devices (including tapes, disks, and drums)
Reflectivity
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Silicon
Spectroscopy
Substrates
Thickness measurement
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Zusammenfassung:X-ray reflectivity (XRR) has been used as an absolute measurement of the thickness of perfluoropolyether (PFPE) lubricant layers on silicon substrates to determine the validity of thickness measurements by electron spectroscopy for chemical analysis (ESCA) and ellipsometry. Excellent agreement is found between these three methods, provided that a 25 /spl Aring/ escape depth for the PFPE film is used in ESCA and the bulk refractive index of the PFPE is used in ellipsometry. It is also essential to properly account for adventitiously adsorbed hydrocarbons.
ISSN:0018-9464
1941-0069
DOI:10.1109/20.706702