Fabrication of Humidity Sensor Based on Bilayer Graphene

Bilayer graphene was synthesized by chemical vapor deposition, for which the optical transmission is ~95%-96%. XPS detected that a few oxygen molecules were absorbed on the surface of graphene. The Raman and optical transmission spectra verified that the graphene sample is bilayer. The responses of...

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Veröffentlicht in:	IEEE electron device letters 2014-05, Vol.35 (5), p.590-592
Hauptverfasser:	Chen, Meng-Chu, Hsu, Cheng-Liang, Hsueh, Ting-Jen
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences bilayer Carbon Chemical vapor deposition (including plasma-enhanced cvd, mocvd, etc.) Copper Cross-disciplinary physics: materials science rheology Electronics Exact sciences and technology General equipment and techniques Graphene Humidity Hygrometers Instruments, apparatus, components and techniques common to several branches of physics and astronomy Materials science Methods of deposition of films and coatings film growth and epitaxy Microelectronic fabrication (materials and surfaces technology) Optical sensors Physics Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices sensor Sensors (chemical, optical, electrical, movement, gas, etc.) remote sensing Substrates Temperature measurement
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Zusammenfassung:	Bilayer graphene was synthesized by chemical vapor deposition, for which the optical transmission is ~95%-96%. XPS detected that a few oxygen molecules were absorbed on the surface of graphene. The Raman and optical transmission spectra verified that the graphene sample is bilayer. The responses of the bilayer graphene sample increased with increased relative humidity.
ISSN:	0741-3106 1558-0563
DOI:	10.1109/LED.2014.2310741