Developing and Integrating TCAD Applications with the Semiconductor Wafer Representation

Bibliographische Detailangaben

Hauptverfasser:	Bonning, D., Chin, G., Cottle, R., Dietrich, W., Duvall, S., Giles, M., Harris, R., Karasick, M., Khalil, N., Law, M., McLennan, M.J., Mozumder, P.K., Nackman, L., Nassif, S., Rajan, V.T., Schroeder, D., Tremain, R., Walker, D.M.H., Wang, R., Wong, A.
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Computer aided manufacturing Data structures Geometry Instruments Physics Prototypes Semiconductor device modeling Software prototyping Software tools Standards development
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