Modeling and measurements of CMUTs with square anisotropic plates

The conventional method of modeling CMUTs use the isotropic plate equation to calculate the deflection, leading to deviations from FEM simulations including anisotropic effects of around 10% in center deflection. In this paper, the deflection is found for square plates using the full anisotropic pla...

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Hauptverfasser:	la Cour, Mette Funding, Christiansen, Thomas Lehrmann, Dahl-Petersen, Christian, Reck, Kasper, Hansen, Ole, Jensen, Jorgen Arendt, Thomsen, Erik Vilain
Format:	Tagungsbericht
Sprache:	eng
Schlagworte:	Anisotropic magnetoresistance Equations Finite element analysis Mathematical model Silicon Substrates Voltage measurement
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