Modeling and measurements of CMUTs with square anisotropic plates

Modeling and measurements of CMUTs with square anisotropic plates

The conventional method of modeling CMUTs use the isotropic plate equation to calculate the deflection, leading to deviations from FEM simulations including anisotropic effects of around 10% in center deflection. In this paper, the deflection is found for square plates using the full anisotropic pla...

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Bibliographische Detailangaben
Hauptverfasser: la Cour, Mette Funding, Christiansen, Thomas Lehrmann, Dahl-Petersen, Christian, Reck, Kasper, Hansen, Ole, Jensen, Jorgen Arendt, Thomsen, Erik Vilain
Format: Tagungsbericht
Sprache:eng
Schlagworte:
Anisotropic magnetoresistance
Equations
Finite element analysis
Mathematical model
Silicon
Substrates
Voltage measurement
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Beschreibung
Zusammenfassung:The conventional method of modeling CMUTs use the isotropic plate equation to calculate the deflection, leading to deviations from FEM simulations including anisotropic effects of around 10% in center deflection. In this paper, the deflection is found for square plates using the full anisotropic plate equation and the Galerkin method. Utilizing the symmetry of the silicon crystal, a compact and accurate expression for the deflection can be obtained. The deviation from FEM in center deflection is
ISSN:1051-0117
DOI:10.1109/ULTSYM.2013.0559