Characterization of submillimeter-wave Schottky diodes in the 500-750 GHz band using micromachined on-wafer probes
For the first time, direct measurement and characterization of planar Schottky diodes using micromachined on-wafer probes operating from 500 to 750 GHz is described. The Schottky diodes are fabricated on a GaAs substrate and integrated into a coplanar waveguide to allow direct measurement of the dev...
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Format: | Tagungsbericht |
Sprache: | eng |
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Zusammenfassung: | For the first time, direct measurement and characterization of planar Schottky diodes using micromachined on-wafer probes operating from 500 to 750 GHz is described. The Schottky diodes are fabricated on a GaAs substrate and integrated into a coplanar waveguide to allow direct measurement of the device calibrated scattering parameters using CPW probes. The measurements are used to establish and verify equivalent circuit models and parasitics for submillimeter-wave diodes that, previously, were based solely on simulation or scaling of measurements done at microwave frequencies. |
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ISSN: | 0149-645X 2576-7216 |
DOI: | 10.1109/MWSYM.2013.6697588 |