Characterization of a GaN Lamb-Wave Sensor for Liquid-Based Mass Sensing Applications

Lamb-wave acoustic devices have been proposed as a promising platform for sensing applications. In this paper, the performance of a GaN Lamb wave device as a liquid-based mass sensor is studied with respect to the effect of environmental parameters to the device performance, namely, the liquid flow-...

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Veröffentlicht in:IEEE sensors journal 2014-03, Vol.14 (3), p.908-911
Hauptverfasser: Pantazis, Alexandros K., Konstantinidis, Georgios, Gizeli, Electra
Format: Artikel
Sprache:eng
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Zusammenfassung:Lamb-wave acoustic devices have been proposed as a promising platform for sensing applications. In this paper, the performance of a GaN Lamb wave device as a liquid-based mass sensor is studied with respect to the effect of environmental parameters to the device performance, namely, the liquid flow-rate, device temperature, and presence of a thin gold film deposited on the GaN membrane.
ISSN:1530-437X
1558-1748
DOI:10.1109/JSEN.2013.2291393