Metrological procurement for modeling conductivity of ultra thin dielectrics with non-uniform boundary by means of TCAD SENTAURUS

Is developed the graphic and technological model of reprogrammed element memory of the actuation device of receiver Glonass navigator in the environment of SENTAURUS TCAD. Is calculation of distribution of electric fields in thin dielectrics on a surface of a shutter with a non-uniform horizontal and vertical profile of relief. The model can be used for calculation of electronic and ionic currents, of conductivity of a dielectric on a shutter depending on heterogeneity of border, definition of their limits parametr of element memory.